Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979585 | Micro-electromechanical system | Eric L. Nikkel, Charles C. Haluzak, Chien-Hua Chen, Mickey Szepesi | 2005-12-27 |
| 6917459 | MEMS device and method of forming MEMS device | Eric L. Nikkel, Mickey Szepesi, Sadiq Bengali, Michael G. Monroe | 2005-07-12 |
| 6914709 | MEMS device and method of forming MEMS device | Michael G. Monroe, Eric L. Nikkel, Michele K. Szepesi, Richard P. Tomasco | 2005-07-05 |