Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979585 | Micro-electromechanical system | Stephen Potochnik, Charles C. Haluzak, Chien-Hua Chen, Mickey Szepesi | 2005-12-27 |
| 6917459 | MEMS device and method of forming MEMS device | Mickey Szepesi, Sadiq Bengali, Michael G. Monroe, Stephen Potochnik | 2005-07-12 |
| 6914709 | MEMS device and method of forming MEMS device | Michael G. Monroe, Michele K. Szepesi, Stephen Potochnik, Richard P. Tomasco | 2005-07-05 |
| 6903487 | Micro-mirror device with increased mirror tilt | Robert W. Shreeve, Michael J. Regan, Sam G. Angelos, Jr. | 2005-06-07 |
| 6861277 | Method of forming MEMS device | Michael G. Monroe, Dennis Lazaroff | 2005-03-01 |