Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6954576 | Guided-wave optical interconnections embedded within a microelectronic wafer-level batch package | Tony Mule, Chirag S. Patel, James D. Meindl, Thomas K. Gaylord, Elias N. Glytsis +4 more | 2005-10-11 |
| 6852195 | Method and apparatus for low energy electron enhanced etching of substrates in an AC or DC plasma environment | Harry P. Gillis, Dmitri A. Choutov | 2005-02-08 |