Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6852195 | Method and apparatus for low energy electron enhanced etching of substrates in an AC or DC plasma environment | Kevin P. Martin, Dmitri A. Choutov | 2005-02-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6852195 | Method and apparatus for low energy electron enhanced etching of substrates in an AC or DC plasma environment | Kevin P. Martin, Dmitri A. Choutov | 2005-02-08 |