Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969852 | Method of evaluating of a scanning electron microscope for precise measurements | Arkady Nikitin | 2005-11-29 |
| 6909791 | Method of measuring a line edge roughness of micro objects in scanning microscopes | Arkady Nikitin | 2005-06-21 |