Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6978215 | Method of determining of true nonlinearity of scan along a selected direction X or Y in scan microscope | — | 2005-12-20 |
| 6969852 | Method of evaluating of a scanning electron microscope for precise measurements | Dmitriy Yeremin | 2005-11-29 |
| 6909791 | Method of measuring a line edge roughness of micro objects in scanning microscopes | Dmitriy Yeremin | 2005-06-21 |
| 6878935 | Method of measuring sizes in scan microscopes | — | 2005-04-12 |