Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979165 | Reduced footprint tool for automated processing of microelectronic substrates | Robert E. Larson, Sean D. Simondet, David C. Zimmerman, Quirin W. Matthys | 2005-12-27 |
| 6845779 | Edge gripping device for handling a set of semiconductor wafers in an immersion processing system | Tim Herbst, Tracy A. Gast, Thomas J. Wagener, Kevin L. Siefering | 2005-01-25 |