Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6845779 | Edge gripping device for handling a set of semiconductor wafers in an immersion processing system | Tim Herbst, Todd Maciej, Tracy A. Gast, Kevin L. Siefering | 2005-01-25 |