Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6875543 | Etched-multilayer phase shifting masks for EUV lithography | Henry N. Chapman | 2005-04-05 |
| 6844272 | Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers | James A. Folta, Claude Montcalm | 2005-01-18 |