Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6918821 | Materials and methods for low pressure chemical-mechanical planarization | Sudhakar Balijepalli, Dale J. Aldrich, Laura A. Grier | 2005-07-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6918821 | Materials and methods for low pressure chemical-mechanical planarization | Sudhakar Balijepalli, Dale J. Aldrich, Laura A. Grier | 2005-07-19 |