Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6918821 | Materials and methods for low pressure chemical-mechanical planarization | Sudhakar Balijepalli, Laura A. Grier, Michael E. Mills | 2005-07-19 |
| 6910951 | Materials and methods for chemical-mechanical planarization | Sudhakar Balijepalli, Laura A. Grier | 2005-06-28 |