Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6908724 | Fluorine-containing polymer having acid-reactive group and chemically amplifying type photoresist composition prepared from same | Takayuki Araki, Meiten Koh, Yoshito Tanaka, Hirokazu Aoyama, Tetsuo Shimizu | 2005-06-21 |