Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6908724 | Fluorine-containing polymer having acid-reactive group and chemically amplifying type photoresist composition prepared from same | Takayuki Araki, Meiten Koh, Yoshito Tanaka, Takuji Ishikawa, Tetsuo Shimizu | 2005-06-21 |
| 6891064 | Process for producing fluoroalkylcarboxylic acid | Kazuyoshi Ichihara | 2005-05-10 |