Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872633 | Deposition and sputter etch approach to extend the gap fill capability of HDP CVD process to ≦0.10 microns | John Sudijono | 2005-03-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872633 | Deposition and sputter etch approach to extend the gap fill capability of HDP CVD process to ≦0.10 microns | John Sudijono | 2005-03-29 |