Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936825 | Process for the decontamination of microlithographic projection exposure devices | Nils Dieckmann, Christine Sieler, Marcus Zehetbauer, Martin Schriever, Gerd Reisinger | 2005-08-30 |
| 6891980 | Method and apparatus for analysis of schlieren | Frank-Thomas Lentes, Christian Kusch, Wolfgang Singer, Ewald Moersen | 2005-05-10 |
| 6842284 | Objective with lenses made of a crystalline material | Daniel Krähmer | 2005-01-11 |