Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936825 | Process for the decontamination of microlithographic projection exposure devices | Michael Gerhard, Nils Dieckmann, Christine Sieler, Marcus Zehetbauer, Martin Schriever | 2005-08-30 |