Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967792 | Apparatus for positioning an optical element in a structure | Ulrich Weber, Dirk Rexhaeuser | 2005-11-22 |
| 6943965 | Method for correcting oscillation-induced imaging errors in an objective | Alexander Kohl | 2005-09-13 |
| 6879379 | Projection lens and microlithographic projection exposure apparatus | Martin Brunotte, Jurgen Hartmaier, Winfried Kaiser, Alexander Kohl, Jens Kugler +2 more | 2005-04-12 |
| 6842294 | Catadioptric objective | Ulrich Weber, Alexander Kohl, Toralf Gruner, Christoph Zaczek, Jens Ullmann +3 more | 2005-01-11 |