Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6963449 | Method for improving the imaging properties of at least two optical elements and photolithographic fabrication method | Birgit Mecking, Toralf Gruner | 2005-11-08 |
| 6943965 | Method for correcting oscillation-induced imaging errors in an objective | Hubert Holderer | 2005-09-13 |
| 6879379 | Projection lens and microlithographic projection exposure apparatus | Martin Brunotte, Jurgen Hartmaier, Hubert Holderer, Winfried Kaiser, Jens Kugler +2 more | 2005-04-12 |
| 6842294 | Catadioptric objective | Hubert Holderer, Ulrich Weber, Toralf Gruner, Christoph Zaczek, Jens Ullmann +3 more | 2005-01-11 |