Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969854 | Arrangement for holding a particle beam apparatus | Michael Trunz | 2005-11-29 |
| 6949744 | Electron microscopy system, electron microscopy method and focusing system for charged particles | Michael Steigerwald | 2005-09-27 |