Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6965428 | Stage apparatus, exposure apparatus, and semiconductor device manufacturing method | Yasuyo Muto, Kazunori Iwamoto, Takashi Meguro | 2005-11-15 |
YT
Yukio Takabayashi
Overall (2005): #68,049 of 245,428Top 30%
1
Patents 2005