Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6965428 | Stage apparatus, exposure apparatus, and semiconductor device manufacturing method | Kazunori Iwamoto, Yukio Takabayashi, Takashi Meguro | 2005-11-15 |
YM
Yasuyo Muto
Overall (2005): #73,354 of 245,428Top 30%
1
Patents 2005