Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6877458 | Apparatus for forming deposited film | Hiroyuki Ozaki, Shotaro Okabe, Masahiro Kanai, Yuzo Koda | 2005-04-12 |
| 6858087 | Vacuum-processing method using a movable cooling plate during processing | Masahiro Kanai, Koichiro Moriyama, Hiroshi Shimoda, Hiroyuki Ozaki | 2005-02-22 |