Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6877458 | Apparatus for forming deposited film | Hiroyuki Ozaki, Masahiro Kanai, Yuzo Koda, Tadashi Hori | 2005-04-12 |
| 6858308 | Semiconductor element, and method of forming silicon-based film | Takaharu Kondo, Masafumi Sano, Akira Sakai, Ryo Hayashi, Shuichiro Sugiyama | 2005-02-22 |