Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6930756 | Electron beam exposure apparatus and semiconductor device manufacturing method | Kotaro Akutsu | 2005-08-16 |
| 6862080 | Substrate holding device, semiconductor manufacturing apparatus and device manufacturing method | — | 2005-03-01 |