Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6930756 | Electron beam exposure apparatus and semiconductor device manufacturing method | Shin Matsui | 2005-08-16 |
| 6879382 | Substrate processing apparatus | Keiji Emoto | 2005-04-12 |
KA
Kotaro Akutsu
Overall (2005): #46,552 of 245,428Top 20%
2
Patents 2005