Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962769 | Anti-reflective coating composition with improved spin bowl compatibility | Xie Shao, Jim D. Meador, Mandar Bhave, Vandana Krishnamurthy, Kelly A. Nowak +1 more | 2005-11-08 |
| 6894104 | Anti-reflective coatings and dual damascene fill compositions comprising styrene-allyl alcohol copolymers | Gu Xu, Jimmy D. Meador, Mandar Bhave, Kelly A. Nowak | 2005-05-17 |
| 6846612 | Organic anti-reflective coating compositions for advanced microlithography | — | 2005-01-25 |