Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6937316 | Lithographic apparatus, device manufacturing method and device manufactured thereby | Hernes Jacobs, Edwin Johan Buis | 2005-08-30 |
| 6933513 | Gas flushing system for use in lithographic apparatus | Tjarko Adriaan Rudolf Van Empel, Raymond Laurentius Johannes Schrijver, Johannes Andreas Henricus Maria Jacobs, Nicolaas Franciscus Koppelaars | 2005-08-23 |