Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6970230 | Lithographic apparatus and device manufacturing method | Petrus Matthijs Henricus Vosters, Harmen Klaas Van Der Schoot, Peter Rutgers | 2005-11-29 |
| 6937316 | Lithographic apparatus, device manufacturing method and device manufactured thereby | Nicolaas Rudolf Kemper, Edwin Johan Buis | 2005-08-30 |
| 6879377 | Lithographic apparatus and device manufacturing method | Piet Vosters, Sven Antoin Johan Hol, Harmen Klaas Van Der Schoot, Robert Johannes Petrus Van Diesen, David Callan | 2005-04-12 |