Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6955741 | Semiconductor-processing reaction chamber | — | 2005-10-18 |
| 6945746 | Semiconductor manufacturing equipment and maintenance method | Takeshi Watanabe, Masaei Suwada | 2005-09-20 |
| 6899507 | Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections | Masaei Suwada, Takeshi Watanabe | 2005-05-31 |
| 6860711 | Semiconductor-manufacturing device having buffer mechanism and method for buffering semiconductor wafers | — | 2005-03-01 |