Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6945746 | Semiconductor manufacturing equipment and maintenance method | Takayuki Yamagishi, Takeshi Watanabe | 2005-09-20 |
| 6899507 | Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections | Takayuki Yamagishi, Takeshi Watanabe | 2005-05-31 |