Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6884317 | Method and installation for etching a substrate | Arjen Storm, Jan Willem Maes | 2005-04-26 |
| 6878628 | In situ reduction of copper oxide prior to silicon carbide deposition | Auguste Sophie, Pekka Soininen, Kai-Erik Elers | 2005-04-12 |