Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899799 | Method and apparatus for improving sidewall coverage during sputtering in a chamber having an inductively coupled plasma | Kenny King-Tai Ngan, Ying HUI | 2005-05-31 |
SR
Seshadri Ramaswami
Overall (2005): #104,571 of 245,428Top 45%
1
Patents 2005