Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6945857 | Polishing pad conditioner and methods of manufacture and recycling | Trung T. Doan, Venkata R. Balagani | 2005-09-20 |
| 6899799 | Method and apparatus for improving sidewall coverage during sputtering in a chamber having an inductively coupled plasma | Ying HUI, Seshadri Ramaswami | 2005-05-31 |