Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6940592 | Calibration as well as measurement on the same workpiece during fabrication | Peter G. Borden, Jon Madsen | 2005-09-06 |
| 6911349 | Evaluating sidewall coverage in a semiconductor wafer | Peter G. Borden | 2005-06-28 |
| 6906801 | Measuring a property of a layer in multilayered structure | Peter G. Borden | 2005-06-14 |