Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6944006 | Guard for electrostatic chuck | Hui Zheng, Kenneth Tsai, Yongxiang He, Jesus Garcia, Daniel Deyo | 2005-09-13 |
| 6902627 | Cleaning chamber surfaces to recover metal-containing compounds | Karl Brueckner | 2005-06-07 |
| 6902628 | Method of cleaning a coated process chamber component | Yongxiang He, Clifford Stow | 2005-06-07 |
| 6899798 | Reusable ceramic-comprising component which includes a scrificial surface layer | Edwin C. Weldon, Yongxiang He, Clifford Stow | 2005-05-31 |