Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902628 | Method of cleaning a coated process chamber component | Hong Wang, Yongxiang He | 2005-06-07 |
| 6899798 | Reusable ceramic-comprising component which includes a scrificial surface layer | Edwin C. Weldon, Yongxiang He, Hong Wang | 2005-05-31 |