Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6884464 | Methods for forming silicon comprising films using hexachlorodisilane in a single-wafer deposion chamber | Lee Luo, R. Suryanarayanan Iyer, Janardhanan Anand Subramony, Xiaoliang Jin, Aihua Chen +4 more | 2005-04-26 |