Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949399 | Method of reducing contamination-induced process variations during ion implantation | Niels-Wieland Hauptmann, Thomas Beck | 2005-09-27 |
| 6897114 | Methods of forming a transistor having a recessed gate electrode structure | Thomas Feudel, Volker Grimm | 2005-05-24 |
| 6852984 | Advanced ion beam measurement tool for an ion implantation apparatus | — | 2005-02-08 |