Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946158 | Deposition of titanium amides | Matthias J. Jahl, Douglas W. Carson, Shantia Riahi | 2005-09-20 |
| 6846515 | Methods for using porogens and/or porogenated precursors to provide porous organosilica glass films with low dielectric constants | Mark Leonard O'Neill, Jean Louise Vincent, Aaron Scott Lukas, Manchao Xiao, John Anthony Thomas Norman | 2005-01-25 |