Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946667 | Apparatus to decelerate and control ion beams to improve the total quality of ion implantation | Jiong Chen, Zhming Wan | 2005-09-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946667 | Apparatus to decelerate and control ion beams to improve the total quality of ion implantation | Jiong Chen, Zhming Wan | 2005-09-20 |