Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946667 | Apparatus to decelerate and control ion beams to improve the total quality of ion implantation | Zhming Wan, Qing Qian | 2005-09-20 |
| 6918351 | Apparatus for ion beam implantation | Zhimin Wan | 2005-07-19 |
| 6865065 | Semiconductor processing chamber substrate holder method and structure | Jihliang Chen, Jianmin Qiao | 2005-03-08 |