Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805139 | Systems and methods for photoresist strip and residue treatment in integrated circuit manufacturing | Stephen E. Savas, Robert Guerra, Wolfgang Helle | 2004-10-19 |
| 6706142 | Systems and methods for enhancing plasma processing of a semiconductor substrate | Stephen E. Savas, Mark Kushner, Ronald L. Kinder | 2004-03-16 |