WH

Wolfgang Helle

MT Mattson Technology: 1 patents #9 of 28Top 35%
Overall (2004): #86,860 of 270,089Top 35%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6805139 Systems and methods for photoresist strip and residue treatment in integrated circuit manufacturing Stephen E. Savas, John Zajac, Robert Guerra 2004-10-19