Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805139 | Systems and methods for photoresist strip and residue treatment in integrated circuit manufacturing | John Zajac, Robert Guerra, Wolfgang Helle | 2004-10-19 |
| 6794301 | Pulsed plasma processing of semiconductor substrates | — | 2004-09-21 |
| 6706142 | Systems and methods for enhancing plasma processing of a semiconductor substrate | John Zajac, Mark Kushner, Ronald L. Kinder | 2004-03-16 |