Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800565 | Method of forming thin oxidation layer by cluster ion beam | Chih-Ching Hu, Patricia L. Cox, Chih-Ling Lee, Ming Mao, Jacques Kools | 2004-10-05 |
| 6716322 | Method and apparatus for controlling film profiles on topographic features | Hari Hedge, Alan V. Hayes, Boris L. Druz, Viktor Kanarov, Emmanuel Lakios | 2004-04-06 |