Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800565 | Method of forming thin oxidation layer by cluster ion beam | Adrian Devasahayam, Patricia L. Cox, Chih-Ling Lee, Ming Mao, Jacques Kools | 2004-10-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800565 | Method of forming thin oxidation layer by cluster ion beam | Adrian Devasahayam, Patricia L. Cox, Chih-Ling Lee, Ming Mao, Jacques Kools | 2004-10-05 |