Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6774550 | Charged particle beam extraction and formation apparatus | Alan V. Hayes, Rustam Yevtukhov, Daniel Yakovlevitch | 2004-08-10 |
| 6716322 | Method and apparatus for controlling film profiles on topographic features | Hari Hedge, Alan V. Hayes, Boris L. Druz, Adrian Devasahayam, Emmanuel Lakios | 2004-04-06 |