Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828247 | Method for etching organic film, method for fabricating semiconductor device and pattern formation method | Hideo Nakagawa, Toshio Hayashi | 2004-12-07 |
YM
Yasuhiro Morikawa
Ulvac: 1 patents #4 of 19Top 25%
Overall (2004): #85,062 of 270,089Top 35%
1
Patents 2004