Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828247 | Method for etching organic film, method for fabricating semiconductor device and pattern formation method | Toshio Hayashi, Yasuhiro Morikawa | 2004-12-07 |
| 6780778 | Method for fabricating semiconductor device | Eiji Tamaoka | 2004-08-24 |
| 6762120 | Semiconductor device and method for fabricating the same | Eiji Tamaoka | 2004-07-13 |