Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828247 | Method for etching organic film, method for fabricating semiconductor device and pattern formation method | Hideo Nakagawa, Yasuhiro Morikawa | 2004-12-07 |
| 6804889 | Scribe device | Hirokazu Ishikawa, Fujio Tateda, Jun Sakamoto, Hideo Oka | 2004-10-19 |